MEMS
Microelectromechanical systems
Price:€ 1.500,00 excl. VAT
Duration:3 consecutive days
Contact:Ellen Lely, +31 24 350 3532, training@hightechinstitute.nl
Information
This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are processed, various applications of MEMS in sensors and actuators, and usage issues of MEMS, assembly and housing, testing and interconnection.
Intended for
Electronic and mechanical design engineers educated to technical college/university level and working in research and product development.
Programme
Introduction to microelectromechanical systems
MST - MEMS - micromachines.
MEMS, general aspects and motivation: miniaturization, portability, monolicity, markets.
Micromechanical processing techniques
Bulk micromachining.
Surface micromachining.
Dry etching.
Wafer bonding techniques.
Problems: outgassing and getters, sticking, drift phenomena.
Sensors and actuators
Pressure sensors, flow sensors.
Accelerometers, gyroscopes.
Electrostatic actuation, xy stages, resonators and RF MEMS.
Thermal sensors, thermal MEMS.
Optical MEMS and applications.
Gas sensors, chemical and biosensors.
Microfluidics.
Packaging issues
Interconnection of systems, assembly, testing and housing.
Methods: lectures, exercises. Course material: course notes. Award: certificate.
Timetable
10-12-2012 09:00
11-12-2012 09:00
12-12-2012 09:00
Microelectromechanical systems
Location:
Eindhoven
Contact:
Ellen Lely
Tel. +31 24 350 3532
E-mail: training@hightechinstitute.nl
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