Electronics

Technical Training for Professionals

Expected in Q1/Q2 2021

Intro

This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are processed, various applications of MEMS in sensors and actuators, and usage issues of MEMS, assembly and housing, testing and interconnection.

Intended for

Electronic and mechanical/mechatronic design engineers (technical college/university level) working in research and product development.
Assumed pre-knowledge: elementary knowledge on IC-technology/processing.

Course schedule Expected in Q1/Q2 2021
Duration 3 consecutive days
Trainers Prof. Bob Puers
Course leader Hans Vink MSc
Score
8.4
(Average score of last 3 editions)
Price € 1,575.00
Keep me posted
Program

Introduction to microelectromechanical systems

  • MST - MEMS - micromachines
  • MEMS, general aspects and motivation: minia­turisation, portability, monolicity, markets

Micromechanical processing techniques

  • Bulk micromachining
  • Surface micromachining
  • Dry etching
  • Wafer bonding techniques
  • Problems: outgassing and getters, sticking, drift phenomena

Sensors and actuators

  • Pressure sensors, flow sensors
  • Accelerometers, gyroscopes
  • Electrostatic actuation, xy stages, resonators and RF MEMS
  • Thermal sensors, thermal MEMS
  • Optical MEMS and applications
  • Gas sensors, chemical and biosensors
  • Microfluidics

Packaging issues

  • Interconnection of systems, assembly, testing and housing
Methods

Lectures and exercises. Course material: course notes.

Certification

Participants will receive a High Tech Institute course certificate for attending this training. 

Remarks from participants

'It was an excellent training both in terms of contents and presentation. The trainer was exceptional in answering the questions raised by the trainees.'

Anonymous (Beijing)

'It was excellent for the beginners who want to study the technology from scratch. I have learnt different technique for MEMS manufacturing which are very helpful.'

Anonymous (Beijing)

'The course was useful for the overall understanding of hardware design of MEMS and the fabrication techniques of MEMS.'

Anonymous (Beijing)

'The training is very nice, in fact excellent. Very informative containing a lot of knowledge about the title of training (MEMS). Everything in training including contents, material and lecturer is excellent.'

Anonymous (Beijing)