Microelectromechanical systems - High Tech Institute

This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are designed and fabricated, various applications of MEMS in sensors and actuators, and usage issues of MEMS.

This training is available for open enrollment as well as for in-company sessions. For in-company sessions, this MEMS training can be adapted to your situation and special needs.

Objective

After having attended the course, the participant knows:

the basic theory of microelectromechanical systems (MEMS),
how MEMS are designed and fabricated,
various applications of MEMS in sensors and actuators,
how MEMS can be used.

Intended for

This course is intended for electronic and mechanical/mechatronic design engineers (technical college/university level) working in research and product development.

Assumed pre-knowledge: elementary knowledge on IC- technology/processing.

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Provisional reservation

Prof. Bob Puers (Previous trainer)

"My PhDs weren’t allowed to leave without leaving something on the table."

Interview

Program

Introduction to microelectromechanical systems

MST - MEMS - micromachines
MEMS, general aspects and motivation: miniaturisation, portability, markets

Micromechanical processing techniques

Bulk micromachining
Surface micromachining
Dry etching
Deep reactive ion etching
Wafer bonding techniques, Silicon on Insulator
Bonding

Sensors and actuators

Transduction methods (capacitive, piezoresistive, piezoelectric)
Pressure sensors
Accelerometers, gyroscopes
Actuators
Acoustic MEMS
Resonant based sensors
Optical MEMS and applications
Gas sensors, chemical and Biosensors

Methods

Lectures and exercises. Course material: course notes.

Certification

Participants will receive a High Tech Institute course certificate for attending this training.

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Remarks from participants

'It was an excellent training both in terms of contents and presentation. The trainer was exceptional in answering the questions raised by the trainees.'

Anonymous (Beijing)

'It was excellent for the beginners who want to study the technology from scratch. I have learnt different technique for MEMS manufacturing which are very helpful.'

Anonymous (Beijing)

'The course was useful for the overall understanding of hardware design of MEMS and the fabrication techniques of MEMS.'

Anonymous (Beijing)

'The training is very nice, in fact excellent. Very informative containing a lot of knowledge about the title of training (MEMS). Everything in training including contents, material and lecturer is excellent.'

Anonymous (Beijing)

Electronics

Microelectromechanical systems (MEMS) training

Objective

Intended for

Program

Methods

Certification

'It was an excellent training both in terms of contents and presentation. The trainer was exceptional in answering the questions raised by the trainees.'

'It was excellent for the beginners who want to study the technology from scratch. I have learnt different technique for MEMS manufacturing which are very helpful.'

'The course was useful for the overall understanding of hardware design of MEMS and the fabrication techniques of MEMS.'

'The training is very nice, in fact excellent. Very informative containing a lot of knowledge about the title of training (MEMS). Everything in training including contents, material and lecturer is excellent.'

Related

IC physics devices and processing

Nanometer CMOS ICs basics

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