Lectures and exercises. Course material: course notes.
This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are designed and fabricated, various applications of MEMS in sensors and actuators, and usage issues of MEMS.
This training stands out due to:
- its professional orientation and industry-connected program;
- its comprehensive end-to-end learning path;
- Prof. Michael Kraft who combines over 20 years of international experience in cutting-edge MEMS-research and cleanroom technologies with a deep interdisciplinary understanding and a passion for applying micro- and nanosystems to real-world challenges.
This training for open enrollments provides a solid foundation in MEMS technology. For experienced engineers who want to go deeper into inertial sensors, piezoelectric and resonant devices, we offer a customizable Advanced MEMS training.
Objective
After having attended the course, the participant knows:
- the basic theory of microelectromechanical systems (MEMS),
- how MEMS are designed and fabricated,
- various applications of MEMS in sensors and actuators,
- how MEMS can be used.
Target Audience
This course is intended for electronic and mechanical/mechatronic design engineers (technical education/university level) working in research and product development.
Assumed pre-knowledge: elementary knowledge on IC- technology/processing.
For groups of participants who want to deepen their knowledge beyond MEMS fundamentals and focus on specific sensor domains, an Advanced MEMS training is available for in-company sessions only.
Program
Introduction to microelectromechanical systems
- MST - MEMS - micromachines
- MEMS, general aspects and motivation: miniaturisation, portability, markets
Micromechanical processing techniques
- Bulk micromachining
- Surface micromachining
- Dry etching
- Deep reactive ion etching
- Wafer bonding techniques, Silicon on Insulator
- Bonding
Sensors and actuators
- Transduction methods (capacitive, piezoresistive, piezoelectric)
- Pressure sensors
- Accelerometers, gyroscopes
- Actuators
- Acoustic MEMS
- Resonant based sensors
- Optical MEMS and applications
- Gas sensors, chemical and Biosensors
Methods
Certification
Participants will receive a High Tech Institute course certificate for attending this training. In addition, this training is part of the Professional Education program of the Dutch Society for Precision Engineering (DSPE), which issues microcredentials for it.
Course Reviews
'It was an excellent training both in terms of contents and presentation. The trainer was exceptional in answering the questions raised by the trainees.'
Anonymous (Beijing)'It was excellent for the beginners who want to study the technology from scratch. I have learnt different technique for MEMS manufacturing which are very helpful.'
Anonymous (Beijing)'The course was useful for the overall understanding of hardware design of MEMS and the fabrication techniques of MEMS.'
Anonymous (Beijing)'The training is very nice, in fact excellent. Very informative containing a lot of knowledge about the title of training (MEMS). Everything in training including contents, material and lecturer is excellent.'
Anonymous (Beijing)
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