Introduction to microelectromechanical systems
- MST - MEMS - micromachines
- MEMS, general aspects and motivation: miniaturisation, portability, monolicity, markets
Micromechanical processing techniques
- Bulk micromachining
- Surface micromachining
- Dry etching
- Wafer bonding techniques
- Problems: outgassing and getters, sticking, drift phenomena
Sensors and actuators
- Pressure sensors, flow sensors
- Accelerometers, gyroscopes
- Electrostatic actuation, xy stages, resonators and RF MEMS
- Thermal sensors, thermal MEMS
- Optical MEMS and applications
- Gas sensors, chemical and biosensors
- Microfluidics
Packaging issues
- Interconnection of systems, assembly, testing and housing
