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Electronics - microelectromechanical


This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are processed, various applications of MEMS in sensors and actuators, and usage issues of MEMS, assembly and housing, testing and interconnection.

Intended for

Electronic and mechanical/mechatronic design engineers (technical college/university level) working in research and product development.
Assumed pre-knowledge: elementary knowledge on IC-technology/processing.


Introduction to microelectromechanical systems

- MST - MEMS - micromachines

- MEMS, general aspects and motivation: minia­turization, portability, monolicity, markets

Micromechanical processing techniques

- Bulk micromachining

- Surface micromachining

- Dry etching

- Wafer bonding techniques

- Problems: outgassing and getters, sticking, drift phenomena

Sensors and actuators

- Pressure sensors, flow sensors

- Accelerometers, gyroscopes

- Electrostatic actuation, xy stages, resonators and RF MEMS

- Thermal sensors, thermal MEMS

- Optical MEMS and applications

- Gas sensors, chemical and biosensors

- Microfluidics

Packaging issues

- Interconnection of systems, assembly, testing and housing


Lectures and exercises. Course material: course notes. Award: certificate.


€ 1.575,00 excl. VAT


3 consecutive days

Teachers Bob Puers

Course leader

Ir. Hans Vink


21-11-2018 | 09:00 - 17:00
22-11-2018 | 09:00 - 17:00
23-11-2018 | 09:00 - 17:00




Tel. +31 85 401 3600

Microelectromechanical systems

Introductory course on micro-electro mechanical systems (MEMS) with the basic theory, how MEMS are processed and various applications.

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