Introduction to microelectromechanical systems
- MST - MEMS - micromachines
- MEMS, general aspects and motivation: miniaturisation, portability, markets
Micromechanical processing techniques
- Bulk micromachining
- Surface micromachining
- Dry etching
- Deep reactive ion etching
- Wafer bonding techniques, Silicon on Insulator
- Bonding
Sensors and actuators
- Transduction methods (capacitive, piezoresistive, piezoelectric)
- Pressure sensors
- Accelerometers, gyroscopes
- Actuators
- Acoustic MEMS
- Resonant based sensors
- Optical MEMS and applications
- Gas sensors, chemical and Biosensors