In this English edition of Basisboek Vacuümtechniek , originally released in Dutch by the Dutch Vacuum Society NEVAC, Bert Suurmeijer PhD, Theo Mulder BSc and Jan Verhoeven PhD, cover all relevant and up-to-date knowledge for anyone who works in research, instrumentation, development or production of vacuum technology. The result is a very detailed and completely up-to-date reference book on vacuum physics and technology.
Since the Dutch version was published, both industry and science have made significant progress in the field of vacuum technology. Vacuum has entered into more industries and areas of research and it forms the basis for higher revenues, precision and efficiency. The production of solar cells and organic displays has left its infancy, science has focused en masse on nano-related subjects and meanwhile the chip industry is on the brink of performing the most crucial step in the IC production, lithography, in vacuum.
The authors have added important updates to the original version, related to vacuum pumps, pressure measurement, ion sources, leak detection and cleaning and working discipline. They have totally revised the chapter on leak detection, because the maximum achievable sensitivity of counter flow leak detection has increased significantly in the past decade. Also, two inside-out leak detection methods have been added, namely the atmosphere method and the bombing method.
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