Lectures and exercises. Course material: course notes.
This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are designed and fabricated, various applications of MEMS in sensors and actuators, and usage issues of MEMS.
This training stands out due to:
- its professional orientation and industry-connected program;
- its comprehensive end-to-end learning path;
- Prof. Michael Kraft who combines over 20 years of international experience in cutting-edge MEMS-research and cleanroom technologies with a deep interdisciplinary understanding and a passion for applying micro- and nanosystems to real-world challenges.
This training is available for open enrollment as well as for in-company sessions. For in-company sessions, this MEMS training can be adapted to your situation and special needs.
Objective
After having attended the course, the participant knows:
- the basic theory of microelectromechanical systems (MEMS),
- how MEMS are designed and fabricated,
- various applications of MEMS in sensors and actuators,
- how MEMS can be used.
Target audience
This course is intended for electronic and mechanical/mechatronic design engineers (technical college/university level) working in research and product development.
Assumed pre-knowledge: elementary knowledge on IC- technology/processing.
Program
Introduction to microelectromechanical systems
- MST - MEMS - micromachines
- MEMS, general aspects and motivation: miniaturisation, portability, markets
Micromechanical processing techniques
- Bulk micromachining
- Surface micromachining
- Dry etching
- Deep reactive ion etching
- Wafer bonding techniques, Silicon on Insulator
- Bonding
Sensors and actuators
- Transduction methods (capacitive, piezoresistive, piezoelectric)
- Pressure sensors
- Accelerometers, gyroscopes
- Actuators
- Acoustic MEMS
- Resonant based sensors
- Optical MEMS and applications
- Gas sensors, chemical and Biosensors
Methods
Certification
Participants will receive a High Tech Institute course certificate for attending this training.
Remarks from participants