IC-PDP

IC physics devices and processing

Information

A basic knowledge of semiconductor physics and devices and of IC processing is needed for quite a number of functions: from IC technology engineers to test and product engineers and IC designers. This course lays the foundation and focuses on the relation between the semiconductor technology and the behavior of the devices.

 

After the course, the participant will have acquired:

• a basic knowledge of semiconductor physics and devices
• a basic knowledge of process steps in IC technology
• a basic knowledge of MOS IC processing
• some knowledge of bipolar IC processing
• a basic knowledge of electrical process characterization and monitoring
• a basic insight in the relation between the semiconductor technology and the behavior of the devices.

Intended for

Junior IC designers, test and product engineers, IC technology engineers, employees who need to have basic knowledge of IC techniques. Required educational level: BSc / MSc in Electronics.

Programme

• Introduction to and history of IC technology, simple process flow (1 x 3 hrs)
• Semiconductor devices and device physics (4 x 3 hrs)
  -    Distribution and transport of charge carriers in semiconductors
  -    Semiconductor fundamentals
  -    PN junction diode
  -    MOSFET transistors
  -    Bipolar transistors
  -    Small and large signal behavior, first and second order effects 
• MOS and bipolar IC processing (5 x 3 hrs)
  -    Oxidation
  -    Diffusion
  -    Ion implantation
  -    Chemical vapor deposition (CVD)
  -    Physical vapor deposition (PVD)
  -    Wet processing
  -    Plasma etching
  -    Photo lithography
• Electrical process characterization and monitoring (PCM and testing, inter/intra layer isolation, sheet resistance, contact, via, TLM, elementary transistor measurements, parasitics, diode leakage, capacitance measurements) (2 x 3 hrs)

 

Open enrolment (environment of Eindhoven) or in-company. Classroom teaching and homework.

Course material: books and a course binder. Certificate in case homework results are sufficient.

Timetable

To be determined