Reserve a placeBook a placeTraining Microelectromechanical systems

Electronics - microelectromechanical

Course overview

This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are processed, various applications of MEMS in sensors and actuators, and usage issues of MEMS, assembly and housing, testing and interconnection.


€ 1.575,00 excl. VAT


3 consecutive days




How participants recommend this training to others:
(average score of last 3 editions)


Prof. Bob Puers

Course Leader

Hans Vink MSc


Expected in Q1/Q2 2021

Next editions

vIntended for

Electronic and mechanical/mechatronic design engineers (technical college/university level) working in research and product development.
Assumed pre-knowledge: elementary knowledge on IC-technology/processing.


Introduction to microelectromechanical systems

- MST - MEMS - micromachines

- MEMS, general aspects and motivation: minia­turisation, portability, monolicity, markets

Micromechanical processing techniques

- Bulk micromachining

- Surface micromachining

- Dry etching

- Wafer bonding techniques

- Problems: outgassing and getters, sticking, drift phenomena

Sensors and actuators

- Pressure sensors, flow sensors

- Accelerometers, gyroscopes

- Electrostatic actuation, xy stages, resonators and RF MEMS

- Thermal sensors, thermal MEMS

- Optical MEMS and applications

- Gas sensors, chemical and biosensors

- Microfluidics

Packaging issues

- Interconnection of systems, assembly, testing and housing


Lectures and exercises. Course material: course notes.


Participants will receive a High Tech Institute course certificate for attending this training. 

Download as pdf

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