This is an introductory course of 3 days on microelectromechanical systems (MEMS): the basic theory and how MEMS are processed, various applications of MEMS in sensors and actuators, and usage issues of MEMS, assembly and housing, testing and interconnection.
€ 1.575,00 excl. VAT
3 consecutive days
How participants recommend this training to others:
(average score of last 3 editions)
Expected in Q1/Q2 2021
Electronic and mechanical/mechatronic design engineers (technical college/university level) worki...
Electronic and mechanical/mechatronic design engineers (technical college/university level) working in research and product development.
Assumed pre-knowledge: elementary knowledge on IC-technology/processing.
Introduction to microelectromechanical systems ...
Introduction to microelectromechanical systems
- MST - MEMS - micromachines
- MEMS, general aspects and motivation: miniaturisation, portability, monolicity, markets
Micromechanical processing techniques
- Bulk micromachining
- Surface micromachining
- Dry etching
- Wafer bonding techniques
- Problems: outgassing and getters, sticking, drift phenomena
Sensors and actuators
- Pressure sensors, flow sensors
- Accelerometers, gyroscopes
- Electrostatic actuation, xy stages, resonators and RF MEMS
- Thermal sensors, thermal MEMS
- Optical MEMS and applications
- Gas sensors, chemical and biosensors
- Interconnection of systems, assembly, testing and housing
Lectures and exercises. Course material: course notes....
Lectures and exercises. Course material: course notes.
Participants will receive a High Tech Institute course certificate for attending this training.&n...
Participants will receive a High Tech Institute course certificate for attending this training.
'It was an excellent training both in terms of contents and presentation. The trainer was exceptional in answering the questions raised by the trainees.'
It was excellent for the beginners who want to study the technology from scratch. I have learnt different technique for MEMS manufacturing which are very helpful.
The course was useful for the overall understanding of hardware design of MEMS and the fabrication techniques of MEMS.
The training is very nice, in fact excellent. Very informative containing a lot of knowledge about the title of training (MEMS). Everything in training including contents, material and lecturer is excellent.